Thomas Wen-Yao Chen
Taiwan Semiconductor Manufacturing Company,Taiwan
Mike Tao Zhang
Hoku Scientific, Inc., USA
James R. Morrison
KAIST, South Korea
Meetings of the TC-SMA
The IEEE RAS TC on Semiconductor Manufacturing Automation (TC-SMA) holds meetings twice a year at the IEEE Conference on Automation Science and Engineering (IEEE CASE) and the Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) within the Winter Simulation Conference. Other meetings may be held depending on the conferences attended by the members.
- The next meeting will be scheduled for MASM in Berlin, Germany, which is held from December 9-12, 2012.
- The presentation from the previous meeting at IEEE CASE 2012, Seoul, South Korea on August 22, 2012 is available on our Previous Meetings website.
The TC-SMA develops special issues to promote the research areas of interest to the TC members and highlight emerging research and technology directions.
- A special issue on Automation for Next Generation High Technology Manufacturing (including a focus on 450mm wafer fabrication) is under discussion by the TC. The target journal will be the IEEE Transactions on Automation Science and Engineering (IEEE T-ASE). More information, including a call for papers, will be posted soon!
- A special issue of C&OR (Computers and Operations Research) is being developed to highlight exceptional papers from the TC sponsored special sessions at IEEE CASE 2012 and MASM 2012. Additional papers of high quality will be solicited via a call for papers. The details will appear soon! Anticipated publication in 2013. Guest editors: Lars Moench (Lead), James R. Morrison, Argon Chen, Andy Ham.
- Organized a special issue of the IEEE Transactions on Automation Science and Engineering (IEEE T-ASE) on Automation in Green Manufacturing together with the TC on Sustainable Production Automation. The target publication date is January 2013. Guest editors: Jingshan Li (Lead), James Morrison, Mike Tao Zhang, Masaru Nakano, Stephan Biller and Bengt Lennartson.
- Organized a special issue of the IEEE Transactions on Automation Science and Engineering (IEEE T-ASE) on Equipment and Operations Automation in the Semiconductor Industry. The issue was published in January 2011, Vol. 8, No. 1. The guest editorial is available to IEEE T-ASE subscribers from this IEEE Xplore link. Guest editors: James R. Morrison (Lead), Chen-Fu Chien, Stephane Dauzere-Peres, Milind Dawande, Han Ding, Jeffery S. Pettinato and Jingang Yi.
The TC-SMA considers organizing workshops on a case by case basis.
- IEEE CASE, August 20, 2012: The TC-SMA co-organized and participated in the 2012 IEEE Conference on Automation Science and Engineering (IEEE CASE) Workshop on Emerging Topics from Special Sessions at CASE 2012. The TC-SMA has archived the presentations on the Workshop website.
Special Sessions at Conferences
The TC-SMA routinely organizes special sessions at the IEEE Conference on Automation Science and Engineering (IEEE CASE) and its members organize the Modeling and Analysis of Semiconductor Manufacturing (MASM) conference yearly. TC members play key roles on the organizing committee, steering committee and program committee of several other conferences related to semiconductor manufacturing automation. The TC website provides further details of conference involvement on the Activities tab.
In 2012, the TC began archiving presentations from our special sessions and organized conferences.
- IEEE CASE, August 2012: The TC organized four special sessions for the 2012 IEEE Conference on Automation Science and Engineering (IEEE CASE). The presentations are available on our Special Sessions website.
Other Services and Activities
The TC-SMA is developing other services to provide to the semiconductor manufacturing automation community. The results will appear soon! If you have suggestions for services we can provide, or wish to support the TC, please contact the TC co-chairs.
Semiconductor Manufacturing Automation
Semiconductor manufacturing is arguably the most complex of manufacturing environments. Reasons for this include tightly constrained production processes, reentrant process flows, expensive sophisticated equipment, variable demand, high levels of automation and an ocean of data. Yet, despite the difficulties, semiconductor manufacturing is a key industry in many industrialized nations and contributes substantially, both directly and indirectly (via business services, for example), to the global economy. With the emergence of highly automated wafer fabrication facilities (fabs), there is a compelling trend to extend the traditional automation scope to integrate with advanced decision technologies (such as Operations Research, Artificial Intelligence and Queuing Theory).
The IEEE RAS Technical Committee on Semiconductor Manufacturing Automation strives to:
- promote basic and applied research in semiconductor manufacturing and automation;
- provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers; and
- facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues)
Topics of interest include, but are not limited to:
- Advanced process control (APC)
- Agent based intelligent systems
- Algorithms for planning, scheduling and coordination
- Automated material handling systems (AMHS)
- Automation in 300mm prime/450mm wafer generations
- Benchmark and case studies
- Cluster tool scheduling and design
- Data mining for yield and production improvement
- Decision support systems (DSS)
- Decision technologies for equipment automation
- Design concepts for equipment and related automation
- Design for manufacturing (DFM)
- Engineering chains and supply chains
- Equipment engineering systems (EES)
- Equipment productivity improvement Factory of the future
- Factory/cell/equipment-level controller design
- Factory modeling, analysis and performance evaluation
- Fully automated factory and remote operation center
- Green semiconductor manufacturing
- Manufacturing execution systems (MES)
- Mobile and wireless applications (RFID)
- Virtual metrology (VM) and its automation (AVM)
- Wafer release and dispatch policies
- Yield enhancement systems and e-Diagnosis
- December 2014: A Special Issue of C&OR on Quantitative Methods in Semiconductor Manufacturing drawing from selected papers in the 2013 Modeling and Analysis of Semiconductor Manufacturing (MASM) conference and the 2013 IEEE Conference on Automation Science and Engineering (CASE) is scheduled for publication.
- December 7-10, 2014: The 10th Annual MASM (Modeling and Analysis of Semiconductor Manufacturing) will be held within the 2014 Winter Simulation Conference in Savannah, GA, USA. Our Technical Committee members largely organize MASM (http://www.wintersim.org/2014/masm.html).
- December 7-10, 2014: Meeting of the Technical Committee planned at MASM 2014, Savannah, GA, USA.
- August 18-22, 2014: 3-4 Special Sessions prepared by Technical Committee members planned for IEEE CASE 2014 (http://www.case2014.org) in Taipei, Taiwan.
- August 18-22, 2014: Meeting of the Technical Committee planned at IEEE CASE 2014 in Taipei, Taiwan.