IEEE Robotics and Automation Society IEEE

Semiconductor Manufacturing Automation


Semiconductor manufacturing is arguably the most complex of manufacturing environments. Reasons for this include tightly constrained production processes, reentrant process flows, expensive sophisticated equipment, variable demand, high levels of automation and an ocean of data. Yet, despite the difficulties, semiconductor manufacturing is a key industry in many industrialized nations and contributes substantially, both directly and indirectly (via business services, for example), to the global economy. With the emergence of highly automated wafer fabrication facilities (fabs), there is a compelling trend to extend the traditional automation scope to integrate with advanced decision technologies (such as Operations Research, Artificial Intelligence and Queuing Theory).

SubPage Left Committee

The IEEE RAS Technical Committee on Semiconductor Manufacturing Automation strives to:

  • promote basic and applied research in semiconductor manufacturing and automation;
  • provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers; and
  • facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues)

Topics of interest include, but are not limited to:

  • Advanced process control (APC)
  • Agent based intelligent systems
  • Algorithms for planning, scheduling and coordination
  • Automated material handling systems (AMHS)
  • Automation in 300mm prime/450mm wafer generations
  • Benchmark and case studies
  • Cluster tool scheduling and design
  • Data mining for yield and production improvement
  • Decision support systems (DSS)
  • Decision technologies for equipment automation
  • Design concepts for equipment and related automation
  • Design for manufacturing (DFM)
  • Engineering chains and supply chains
  • Equipment engineering systems (EES)
  • Equipment productivity improvement Factory of the future
  • Factory/cell/equipment-level controller design
  • Factory modeling, analysis and performance evaluation
  • Fully automated factory and remote operation center
  • Green semiconductor manufacturing
  • Manufacturing execution systems (MES)
  • Mobile and wireless applications (RFID)
  • Virtual metrology (VM) and its automation (AVM)
  • Wafer release and dispatch policies
  • Yield enhancement systems and e-Diagnosis

subPage Left Activities


  • December 2014: A Special Issue of C&OR on Quantitative Methods in Semiconductor Manufacturing drawing from selected papers in the 2013 Modeling and Analysis of Semiconductor Manufacturing (MASM) conference and the 2013 IEEE Conference on Automation Science and Engineering (CASE) is scheduled for publication.
  • December 7-10, 2014: The 10th Annual MASM (Modeling and Analysis of Semiconductor Manufacturing) will be held within the 2014 Winter Simulation Conference in Savannah, GA, USA. Our Technical Committee members largely organize MASM (
  • December 7-10, 2014: Meeting of the Technical Committee planned at MASM 2014, Savannah, GA, USA.
  • August 18-22, 2014: 3-4 Special Sessions prepared by Technical Committee members planned for IEEE CASE 2014 ( in Taipei, Taiwan. 
  • August 18-22, 2014: Meeting of the Technical Committee planned at IEEE CASE 2014 in Taipei, Taiwan.