IEEE Robotics and Automation Society IEEE

Semiconductor Manufacturing Automation


Semiconductor manufacturing is arguably the most complex of manufacturing environments. Reasons for this include tightly constrained production processes, reentrant process flows, expensive sophisticated equipment, variable demand, high levels of automation and an ocean of data. Yet, despite the difficulties, semiconductor manufacturing is a key industry in many industrialized nations and contributes substantially, both directly and indirectly (via business services, for example), to the global economy. With the emergence of highly automated wafer fabrication facilities (fabs), there is a compelling trend to extend the traditional automation scope to integrate with advanced decision technologies (such as Operations Research, Artificial Intelligence and Queuing Theory).

SubPage Left Committee

The IEEE RAS Technical Committee on Semiconductor Manufacturing Automation strives to:

  • Promote basic and applied research in semiconductor manufacturing and automation;
  • Provide a forum for exchanging ideas among semiconductor manufacturing researchers and engineers; and
  • Facilitate related scientific publications and events (such as special conference sessions, workshops, symposia, and special journal issues)

Topics of interest include, but are not limited to:

  • Advanced process control (APC)
  • Agent based intelligent systems
  • Algorithms for planning, scheduling and coordination
  • Automated material handling systems (AMHS)
  • Automation in 300mm prime/450mm wafer generations
  • Benchmark and case studies
  • Big data analytics for semiconductor manufacturing
  • Cluster tool scheduling and design
  • Data mining for yield and production improvement
  • Decision support systems (DSS)
  • Decision technologies for equipment automation
  • Design concepts for equipment and related automation
  • Design for manufacturing (DFM)
  • Engineering and design chain optimization
  • Equipment engineering systems (EES)
  • Equipment modeling and optimization
  • Equipment productivity improvement
  • Factory of the future
  • Factory/cell/equipment-level controller design
  • Factory modeling, analysis and performance evaluation
  • Fully automated factory and remote operation center
  • Green semiconductor manufacturing
  • Maintenance policy optimization
  • Manufacturing execution systems (MES)
  • Mobile and wireless applications (RFID)
  • Semiconductor supply chain modeling and optimization
  • Simulation methodologies for semiconductor manufacturing
  • Virtual metrology (VM) and its automation (AVM)
  • Wafer release and dispatch policies
  • Yield enhancement systems and e-Diagnosis

subPage Left Activities


TC members, board and co-chairs annually organize and attend meetings for our community. 

TC members, board and co-chairs develop and serve as guest editors for special issues of journals on topics of interest to our community.